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Incheon, KR
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last 30 patents
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Patent Grant
Apparatus and method for processing substrate
Patent number
11,897,007
Issue date
Feb 13, 2024
Semes Co., Ltd.
Yun Hwa Hong
B08 - CLEANING
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last 30 patents
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Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
Publication number
20230115670
Publication date
Apr 13, 2023
SEMES CO., LTD.
Yun Hwa Hong
B08 - CLEANING