Yun Mo

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature adjusting device
- Patent number 11,715,654
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Yun Mo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,075,062
- Issue date Jul 27, 2021
- Tokyo Electron Limited
- Yun Mo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring method and apparatus in semiconductor process...
- Patent number 6,798,036
- Issue date Sep 28, 2004
- Tokyo Electron Limited
- Mo Yun
- G01 - MEASURING TESTING
Information Patent Grant
Thermal processing apparatus
- Patent number 6,630,991
- Issue date Oct 7, 2003
- Tokyo Electron Limited
- Masayuki Kitamura
- G01 - MEASURING TESTING
Information Patent Grant
Temperature measuring method and apparatus in semiconductor process...
- Patent number 6,579,731
- Issue date Jun 17, 2003
- Tokyo Electron Limited
- Mo Yun
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE ADJUSTING DEVICE
- Publication number 20210028029
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Yun Mo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20200161105
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Yun Mo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COOLING DEVICE, SUBSTRATE COOLING METHOD AND HEAT TREATME...
- Publication number 20130062035
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Masato Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature measuring method and apparatus in semiconductor process...
- Publication number 20030206574
- Publication date Nov 6, 2003
- TOKYO ELECTRON LIMITED
- Mo Yun
- G01 - MEASURING TESTING
Information Patent Application
Temperature measuring method and apparatus in semiconductor process...
- Publication number 20020068371
- Publication date Jun 6, 2002
- TOKYO ELECTRON LIMITED
- Mo Yun
- G01 - MEASURING TESTING
Information Patent Application
Thermal processing apparatus
- Publication number 20020020696
- Publication date Feb 21, 2002
- Masayuki Kitamura
- G01 - MEASURING TESTING