Yunfei LUO

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Chengdu, CN

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Patents Grantslast 30 patents

Information Patent Grant
Photolithography method
- Patent number 12,181,794
- Issue date Dec 31, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for preparing super-resolution lens based on metal-dielectri...
- Patent number 12,085,741
- Issue date Sep 10, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G02 - OPTICS
Information Patent Grant
Near-field lithography immersion system, immersion unit and interfa...
- Patent number 12,078,937
- Issue date Sep 3, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Super-resolution imaging photolithography
- Patent number 9,958,784
- Issue date May 1, 2018
- THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...
- Publication number 20240272558
- Publication date Aug 15, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PREPARING SUPER-RESOLUTION LENS BASED ON METAL-DIELECTRI...
- Publication number 20240264343
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G02 - OPTICS
Information Patent Application
PHOTOLITHOGRAPHY METHOD
- Publication number 20240264523
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
- Publication number 20160259253
- Publication date Sep 8, 2016
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY