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Yung Cheng Chang
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Tainan County, TW
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last 30 patents
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Patent Grant
Manufacturing execution system with virtual-metrology capabilities...
Patent number
8,983,644
Issue date
Mar 17, 2015
National Cheng Kung University
Fan-Tien Cheng
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
MANUFACTURING EXECUTION SYSTEM WITH VIRTUAL-METROLOGY CAPABILITIES...
Publication number
20110251707
Publication date
Oct 13, 2011
National Cheng Kung University
Fan-Tien CHENG
G05 - CONTROLLING REGULATING
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Patent Application
Wafer carrier transport management method and system thereof
Publication number
20060095153
Publication date
May 4, 2006
Yung Cheng Chang
G05 - CONTROLLING REGULATING