Yung-Cheng Chang

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Patents Grantslast 30 patents

Information Patent Grant
Tool function to improve fab process in semiconductor manufacturing
- Patent number 9,002,498
- Issue date Apr 7, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Cheng Chang
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Novel Design of Tool Function to Improve Fab Process in Semiconduct...
- Publication number 20130204418
- Publication date Aug 8, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Yung-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS