Yung-Yu YEN

Person

NEW TAIPEI CITY, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor devices using directional pro...
- Patent number 12,230,507
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Wen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 12,153,350
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ru-Gun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 12,148,653
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ru-Gun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography process monitoring method
- Patent number 12,085,867
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line-end extension method and device
- Patent number 12,062,543
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Min Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self aligned litho etch process patterning method
- Patent number 12,014,926
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Min Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional deposition for semiconductor fabrication
- Patent number 11,955,338
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Chun Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating semiconductor device with reduced trench dist...
- Patent number 11,894,238
- Issue date Feb 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Sung Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fine line patterning methods
- Patent number 11,862,465
- Issue date Jan 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Chun Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line-end extension method and device
- Patent number 11,854,807
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Min Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 11,854,996
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chiu-Hsiang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 11,796,922
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ru-Gun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern fidelity enhancement
- Patent number 11,791,161
- Issue date Oct 17, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Tien Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography process monitoring method
- Patent number 11,782,352
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 11,764,068
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ru-Gun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices using directional pro...
- Patent number 11,651,972
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Wen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self aligned litho etch process patterning method
- Patent number 11,610,778
- Issue date Mar 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Min Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional deposition for semiconductor fabrication
- Patent number 11,569,090
- Issue date Jan 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Chun Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lithography process monitoring method
- Patent number 11,467,509
- Issue date Oct 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating semiconductor device with reduced trench dist...
- Patent number 11,387,113
- Issue date Jul 12, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Sung Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fine line patterning methods
- Patent number 11,239,078
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Chun Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern fidelity enhancement with directional patterning technology
- Patent number 11,158,509
- Issue date Oct 26, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Tien Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices using directional pro...
- Patent number 11,094,556
- Issue date Aug 17, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ya-Wen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and a method for fabricating the same
- Patent number 11,088,030
- Issue date Aug 10, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Yao Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional deposition for semiconductor fabrication
- Patent number 11,075,079
- Issue date Jul 27, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Chun Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual power structure with connection pins
- Patent number 11,024,579
- Issue date Jun 1, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wei Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 11,004,729
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ru-Gun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 10,991,657
- Issue date Apr 27, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chiu-Hsiang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography process monitoring method
- Patent number 10,962,892
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fin-like field effect transistor patterning methods for increasing...
- Patent number 10,957,551
- Issue date Mar 23, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Yuan Tseng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20250044708
- Publication date Feb 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240387247
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240297042
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Min HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE WITH REDUCED TRENCH DIST...
- Publication number 20240178002
- Publication date May 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Sung Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE-END EXTENSION METHOD AND DEVICE
- Publication number 20240087896
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Min HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240019787
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20230369062
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY PROCESS MONITORING METHOD
- Publication number 20230367234
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FIDELITY ENHANCEMENT
- Publication number 20230369047
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Tien Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING DIRECTIONAL PRO...
- Publication number 20230260803
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Wen YEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF ALIGNED LITHO ETCH PROCESS PATTERNING METHOD
- Publication number 20230230836
- Publication date Jul 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Min HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Directional Deposition for Semiconductor Fabrication
- Publication number 20230170218
- Publication date Jun 1, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Chun Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Control in Semiconductor Processing
- Publication number 20220367292
- Publication date Nov 17, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yen-Lin CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY PROCESS MONITORING METHOD
- Publication number 20220365452
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LINE-END EXTENSION METHOD AND DEVICE
- Publication number 20220359203
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Min HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Fabricating Semiconductor Device With Reduced Trench Dist...
- Publication number 20220344170
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Sung Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20220285168
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINE LINE PATTERNING METHODS
- Publication number 20220157605
- Publication date May 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chun HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING DIRECTIONAL PRO...
- Publication number 20210375639
- Publication date Dec 2, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Wen YEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND A METHOD FOR FABRICATING THE SAME
- Publication number 20210366779
- Publication date Nov 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Yao LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Directional Deposition for Semiconductor Fabrication
- Publication number 20210358752
- Publication date Nov 18, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Chun Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY PROCESS MONITORING METHOD
- Publication number 20210286274
- Publication date Sep 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20210280455
- Publication date Sep 9, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE-END EXTENSION METHOD AND DEVICE
- Publication number 20210272808
- Publication date Sep 2, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Min HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF ALIGNED LITHO ETCH PROCESS PATTERNING METHOD
- Publication number 20210249267
- Publication date Aug 12, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Min HSIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20210242136
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chiu-Hsiang CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Fidelity Enhancement
- Publication number 20210118674
- Publication date Apr 22, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Tien Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20210096473
- Publication date Apr 1, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE WITH REDUCED TRENCH DIST...
- Publication number 20210057231
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Sung Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINE LINE PATTERNING METHODS
- Publication number 20200335340
- Publication date Oct 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Chun HUANG
- H01 - BASIC ELECTRIC ELEMENTS

Yung-Yu YEN

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor devices using directional pro...

Method of manufacturing semiconductor devices

Method of manufacturing semiconductor devices

Lithography process monitoring method

Line-end extension method and device

Self aligned litho etch process patterning method

Directional deposition for semiconductor fabrication

Method of fabricating semiconductor device with reduced trench dist...

Fine line patterning methods

Line-end extension method and device

Method for fabricating semiconductor device

Method of manufacturing semiconductor devices

Pattern fidelity enhancement

Lithography process monitoring method

Method of manufacturing semiconductor devices

Method of manufacturing semiconductor devices using directional pro...

Self aligned litho etch process patterning method

Directional deposition for semiconductor fabrication

Lithography process monitoring method

Method of fabricating semiconductor device with reduced trench dist...

Fine line patterning methods

Pattern fidelity enhancement with directional patterning technology

Method of manufacturing semiconductor devices using directional pro...

Semiconductor device and a method for fabricating the same

Directional deposition for semiconductor fabrication

Dual power structure with connection pins

Method of manufacturing semiconductor devices

Method for fabricating semiconductor device

Lithography process monitoring method

Fin-like field effect transistor patterning methods for increasing...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF FABRICATING SEMICONDUCTOR DEVICE WITH REDUCED TRENCH DIST...

LINE-END EXTENSION METHOD AND DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

LITHOGRAPHY PROCESS MONITORING METHOD

PATTERN FIDELITY ENHANCEMENT

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING DIRECTIONAL PRO...

SELF ALIGNED LITHO ETCH PROCESS PATTERNING METHOD

Directional Deposition for Semiconductor Fabrication

Gas Control in Semiconductor Processing

LITHOGRAPHY PROCESS MONITORING METHOD

LINE-END EXTENSION METHOD AND DEVICE

Method Of Fabricating Semiconductor Device With Reduced Trench Dist...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

FINE LINE PATTERNING METHODS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING DIRECTIONAL PRO...

SEMICONDUCTOR DEVICE AND A METHOD FOR FABRICATING THE SAME

Directional Deposition for Semiconductor Fabrication

LITHOGRAPHY PROCESS MONITORING METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

LINE-END EXTENSION METHOD AND DEVICE

SELF ALIGNED LITHO ETCH PROCESS PATTERNING METHOD

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

Pattern Fidelity Enhancement

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

METHOD OF FABRICATING SEMICONDUCTOR DEVICE WITH REDUCED TRENCH DIST...

FINE LINE PATTERNING METHODS