YUNGJUN KIM

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Process chamber and substrate processing apparatus including the same
- Patent number 11,610,788
- Issue date Mar 21, 2023
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber and substrate processing apparatus including the same
- Patent number 10,991,600
- Issue date Apr 27, 2021
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus, facility of manufacturing semiconductor...
- Patent number 10,825,698
- Issue date Nov 3, 2020
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus, chemical mechanical polishing system including...
- Patent number 10,388,537
- Issue date Aug 20, 2019
- Samsung Electronics Co., Ltd.
- Chae Lyoung Kim
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
WAFER CLEANING EQUIPMENT
- Publication number 20240006195
- Publication date Jan 4, 2024
- Samsung Electronics Co., Ltd.
- YUNSEOK Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process Chamber and Substrate Processing Apparatus Including the Same
- Publication number 20210217636
- Publication date Jul 15, 2021
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING...
- Publication number 20210098261
- Publication date Apr 1, 2021
- Samsung Electronics Co., Ltd.
- Chae Lyoung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process Chamber and Substrate Processing Apparatus Including the Same
- Publication number 20180366349
- Publication date Dec 20, 2018
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DRYING APPARATUS, FACILITY OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20180366348
- Publication date Dec 20, 2018
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING...
- Publication number 20180315613
- Publication date Nov 1, 2018
- Samsung Electronics Co., Ltd.
- Chae Lyoung KIM
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING...
- Publication number 20170301553
- Publication date Oct 19, 2017
- Samsung Electronics Co., Ltd.
- Chae Lyoung KIM
- H01 - BASIC ELECTRIC ELEMENTS

YUNGJUN KIM

Person

Patents Grantslast 30 patents

Process chamber and substrate processing apparatus including the same

Process chamber and substrate processing apparatus including the same

Substrate drying apparatus, facility of manufacturing semiconductor...

Cleaning apparatus, chemical mechanical polishing system including...

Patents Applicationslast 30 patents

WAFER CLEANING EQUIPMENT

Process Chamber and Substrate Processing Apparatus Including the Same

CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING...

Process Chamber and Substrate Processing Apparatus Including the Same

SUBSTRATE DRYING APPARATUS, FACILITY OF MANUFACTURING SEMICONDUCTOR...

CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING...

CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING...