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Seoul, KR
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last 30 patents
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Patent Grant
Method for measuring CD using scanning electron microscope
Patent number
11,740,073
Issue date
Aug 29, 2023
Samsung Electronics Co., Ltd.
Jooho Kim
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
METHOD OF DETECTING MEASUREMENT ERROR OF SEM EQUIPMENT AND METHOD O...
Publication number
20230043003
Publication date
Feb 9, 2023
Samsung Electronics Co., Ltd.
Nohong KWAK
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
METHOD FOR MEASURING CD USING SCANNING ELECTRON MICROSCOPE
Publication number
20220299315
Publication date
Sep 22, 2022
Samsung Electronics Co., Ltd.
JOOHO KIM
G06 - COMPUTING CALCULATING COUNTING