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Yunju Ra
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Irvine, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Inductively coupled plasma generation system with a parallel antenn...
Patent number
7,871,490
Issue date
Jan 18, 2011
Top Engineering Co., Ltd.
Harqkyun Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for clamping a substrate
Patent number
5,894,400
Issue date
Apr 13, 1999
WJ Semiconductor Equipment Group, Inc.
Andrew J. Graven
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
Inductively coupled plasma generation system with a parallel antenn...
Publication number
20060124059
Publication date
Jun 15, 2006
Harqkyun Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Inductively coupled plasma generation system with a parallel antenn...
Publication number
20040182319
Publication date
Sep 23, 2004
Harqkyun Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...