Yunosuke HASHIMOTO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus, abnormality determination method, and...
- Patent number 10,662,531
- Issue date May 26, 2020
- Tokyo Electron Limited
- Kazushi Kaneko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma processing apparatus and microwave supply method
- Patent number 9,241,397
- Issue date Jan 19, 2016
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus, abnormal oscillation determination met...
- Patent number 9,159,536
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, ABNORMALITY DETERMINATION METHOD, AND...
- Publication number 20150194292
- Publication date Jul 9, 2015
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE SUPPLY METHOD
- Publication number 20150108897
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS, ABNORMAL OSCILLATION DETERMINATION MET...
- Publication number 20150022086
- Publication date Jan 22, 2015
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR