Yuri Glukhoy

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Modified etch-and-deposit Bosch process in silicon
- Patent number 10,991,592
- Issue date Apr 27, 2021
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D printing apparatus using a beam of an atmospheric pressure induc...
- Patent number 10,730,239
- Issue date Aug 4, 2020
- Yuri Glukhoy
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Plasma beam penetration of millimeter scale holes with high aspect...
- Patent number 10,475,628
- Issue date Nov 12, 2019
- Main Law Cafe
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead-cooler system of a semiconductor-processing chamber for...
- Patent number 9,484,190
- Issue date Nov 1, 2016
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for providing uniform distribution of plasma density in a pl...
- Patent number 9,275,840
- Issue date Mar 1, 2016
- Yuri Glukhoy
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Torch system for depositing protective coatings on interior walls a...
- Patent number 9,273,393
- Issue date Mar 1, 2016
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for application of thin coatings from plasma o...
- Patent number 8,062,470
- Issue date Nov 22, 2011
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF antenna assembly for treatment of inner surfaces of tubes with i...
- Patent number 7,967,945
- Issue date Jun 28, 2011
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aerosol mass spectrometer for operation in a high-duty mode and met...
- Patent number 7,148,472
- Issue date Dec 12, 2006
- NGX, Inc.
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass spectrometry system for continuous control of environment
- Patent number 7,071,466
- Issue date Jul 4, 2006
- NGX, Inc.
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization device for aerosol mass spectrometer and method of ioniz...
- Patent number 6,974,957
- Issue date Dec 13, 2005
- Nanomat, Inc.
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-cyclotron resonance type ion beam source for ion implanter
- Patent number 6,803,585
- Issue date Oct 12, 2004
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass spectrometer based on the use of quadrupole lenses with angula...
- Patent number 6,791,079
- Issue date Sep 14, 2004
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment apparatus with improved uniformity of treatment an...
- Patent number 6,783,629
- Issue date Aug 31, 2004
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MODIFIED ETCH-AND-DEPOSIT BOSCH PROCESS IN SILICON
- Publication number 20200051826
- Publication date Feb 13, 2020
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA BEAM PENETRATION OF MILLIMETER SCALE HOLES WITH HIGH ASPECT...
- Publication number 20190221402
- Publication date Jul 18, 2019
- Nanocoating Plasma Systems Inc.
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROVIDING UNIFORM DISTRIBUTION OF PLASMA DENSITY IN A PL...
- Publication number 20150214013
- Publication date Jul 30, 2015
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD-COOLER SYSTEM OF A SEMICONDUCTOR-PROCESSING CHAMBER FOR...
- Publication number 20150214009
- Publication date Jul 30, 2015
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TORCH SYSTEM FOR DEPOSITING PROTECTIVE COATINGS ON INTERIOR WALLS A...
- Publication number 20150211123
- Publication date Jul 30, 2015
- Yuri GLUKHOY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF antenna assembly for treatment of inner surfaces of tubes with i...
- Publication number 20090297730
- Publication date Dec 3, 2009
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF antenna assembly having an antenna with transversal magnetic fie...
- Publication number 20090284421
- Publication date Nov 19, 2009
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for application of thin coatings from plasma o...
- Publication number 20090280268
- Publication date Nov 12, 2009
- Yuri Glukhoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for manufacture of nanoparticles
- Publication number 20050258149
- Publication date Nov 24, 2005
- Yuri Glukhoy
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Mass spectrometry system for continuous control of environment
- Publication number 20050230614
- Publication date Oct 20, 2005
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Aerosol mass spectrometer for operation in a high-duty mode and met...
- Publication number 20050189484
- Publication date Sep 1, 2005
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ionization device for aerosol mass spectrometer and method of ioniz...
- Publication number 20050178975
- Publication date Aug 18, 2005
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron-cyclotron resonance type ion beam source for ion implanter
- Publication number 20030234369
- Publication date Dec 25, 2003
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma treatment apparatus with improved uniformity of treatment an...
- Publication number 20030168172
- Publication date Sep 11, 2003
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mass spectrometer based on the use of quadrupole lenses with angula...
- Publication number 20030141445
- Publication date Jul 31, 2003
- Yuri Glukhoy
- H01 - BASIC ELECTRIC ELEMENTS

Yuri Glukhoy

Person

Patents Grantslast 30 patents

Modified etch-and-deposit Bosch process in silicon

3D printing apparatus using a beam of an atmospheric pressure induc...

Plasma beam penetration of millimeter scale holes with high aspect...

Showerhead-cooler system of a semiconductor-processing chamber for...

Method for providing uniform distribution of plasma density in a pl...

Torch system for depositing protective coatings on interior walls a...

Method and apparatus for application of thin coatings from plasma o...

RF antenna assembly for treatment of inner surfaces of tubes with i...

Aerosol mass spectrometer for operation in a high-duty mode and met...

Mass spectrometry system for continuous control of environment

Ionization device for aerosol mass spectrometer and method of ioniz...

Electron-cyclotron resonance type ion beam source for ion implanter

Mass spectrometer based on the use of quadrupole lenses with angula...

Plasma treatment apparatus with improved uniformity of treatment an...

Patents Applicationslast 30 patents

MODIFIED ETCH-AND-DEPOSIT BOSCH PROCESS IN SILICON

PLASMA BEAM PENETRATION OF MILLIMETER SCALE HOLES WITH HIGH ASPECT...

METHOD FOR PROVIDING UNIFORM DISTRIBUTION OF PLASMA DENSITY IN A PL...

SHOWERHEAD-COOLER SYSTEM OF A SEMICONDUCTOR-PROCESSING CHAMBER FOR...

TORCH SYSTEM FOR DEPOSITING PROTECTIVE COATINGS ON INTERIOR WALLS A...

RF antenna assembly for treatment of inner surfaces of tubes with i...

RF antenna assembly having an antenna with transversal magnetic fie...

Method and apparatus for application of thin coatings from plasma o...

Method and apparatus for manufacture of nanoparticles

Mass spectrometry system for continuous control of environment

Aerosol mass spectrometer for operation in a high-duty mode and met...

Ionization device for aerosol mass spectrometer and method of ioniz...

Electron-cyclotron resonance type ion beam source for ion implanter

Plasma treatment apparatus with improved uniformity of treatment an...

Mass spectrometer based on the use of quadrupole lenses with angula...