Yuri Paskover

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for metrology with layer-specific illumination...
- Patent number 11,852,590
- Issue date Dec 26, 2023
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Moiré scatterometry overlay
- Patent number 11,841,621
- Issue date Dec 12, 2023
- KLA Corporation CA
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On-the-fly scatterometry overlay metrology target
- Patent number 11,378,394
- Issue date Jul 5, 2022
- KLA Corporation
- Yuri Paskover
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR ISOLATION OF SPECIFIC FOURIER PUPIL FREQUENCY...
- Publication number 20230314344
- Publication date Oct 5, 2023
- Yuri Paskover
- G01 - MEASURING TESTING
Information Patent Application
SCANNING SCATTEROMETRY OVERLAY METROLOGY
- Publication number 20230314319
- Publication date Oct 5, 2023
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
MOIRÉ SCATTEROMETRY OVERLAY
- Publication number 20230133640
- Publication date May 4, 2023
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
ON-THE-FLY SCATTEROMETRY OVERLAY METROLOGY TARGET
- Publication number 20220187062
- Publication date Jun 16, 2022
- KLA Corporation
- Yuri Paskover
- G01 - MEASURING TESTING