Yurii Victorovitch Sidelkov

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Troitsk, RU

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Patents Grantslast 30 patents

Information Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
- Patent number 7,528,395
- Issue date May 5, 2009
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
Radiation source, lithographic apparatus and device manufacturing m...
- Publication number 20040105082
- Publication date Jun 3, 2004
- ASML NETHERLANDS B.V.
- Konstantin Nikolaevitch Koshelev
- F28 - HEAT EXCHANGE IN GENERAL