Yurii Victorovitch Sidelnikov

Person

Moscow Region, RU

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus
- Patent number 9,307,624
- Issue date Apr 5, 2016
- ASML Netherlands B.V.
- Denis Alexandrovich Glushkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 8,294,128
- Issue date Oct 23, 2012
- ASML Netherlands B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus, radiation system and device manufacturing m...
- Patent number 8,018,574
- Issue date Sep 13, 2011
- ASML Netherlands B.V.
- Robert Rafilevitch Gayazov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and device manufacturing method
- Patent number 7,928,412
- Issue date Apr 19, 2011
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 7,825,390
- Issue date Nov 2, 2010
- ASML Netherlands B.V.
- Vladimir Mihallovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Assembly for detection of radiation flux and contamination of an op...
- Patent number 7,800,079
- Issue date Sep 21, 2010
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and device manufacturing method
- Patent number 7,629,594
- Issue date Dec 8, 2009
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation system, contamination barrier, lithographic apparatus, de...
- Patent number 7,034,308
- Issue date Apr 25, 2006
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...
- Publication number 20130070218
- Publication date Mar 21, 2013
- ASML Netherland B.V.
- Vladimir Vitalevich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTRE...
- Publication number 20110020752
- Publication date Jan 27, 2011
- ASML NETHERLANDS B.V.
- Yurii Victorovitch Sidelnikov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS WITH PLASMA RADIATION SOURCE AND METHOD OF FORMING A BEAM...
- Publication number 20110013167
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch KRIVTSUN
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20100002211
- Publication date Jan 7, 2010
- ASML NETHERLANDS B.V.
- Denis GLUSHKOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Lithographic Apparatus, and Device Manufacturing Method
- Publication number 20090173360
- Publication date Jul 9, 2009
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus VAN HERPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus with plasma radiation source and method of forming a beam...
- Publication number 20080192218
- Publication date Aug 14, 2008
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithographic apparatus, and device manufacturing method
- Publication number 20080083885
- Publication date Apr 10, 2008
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, radiation system and device manufacturing m...
- Publication number 20070001126
- Publication date Jan 4, 2007
- ASML NETHERLANDS B.V.
- Robert Rafilevitch Gayazov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Assembly for detection of radiation flux and contamination of an op...
- Publication number 20050133727
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation system, contamination barrier, lithographic apparatus, de...
- Publication number 20050077483
- Publication date Apr 14, 2005
- ASML NETHERLANDS B.V.
- Levinus Pieter Bakker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yurii Victorovitch Sidelnikov

Person

Patents Grantslast 30 patents

Lithographic apparatus

Apparatus with plasma radiation source and method of forming a beam...

Lithographic apparatus, radiation system and device manufacturing m...

Lithographic apparatus, and device manufacturing method

Apparatus with plasma radiation source and method of forming a beam...

Assembly for detection of radiation flux and contamination of an op...

Lithographic apparatus, and device manufacturing method

Radiation system, contamination barrier, lithographic apparatus, de...

Patents Applicationslast 30 patents

SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...

EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTRE...

APPARATUS WITH PLASMA RADIATION SOURCE AND METHOD OF FORMING A BEAM...

LITHOGRAPHIC APPARATUS

Lithographic Apparatus, and Device Manufacturing Method

Apparatus with plasma radiation source and method of forming a beam...

Lithographic apparatus, and device manufacturing method

Lithographic apparatus, radiation system and device manufacturing m...

Assembly for detection of radiation flux and contamination of an op...

Radiation system, contamination barrier, lithographic apparatus, de...