Yuriko KATO

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
MEMS element and method of manufacturing the same
- Patent number 9,045,330
- Issue date Jun 2, 2015
- Kabushiki Kaisha Toshiba
- Yuriko Kato
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20130285163
- Publication date Oct 31, 2013
- Kabushiki Kaisha Toshiba
- Yuriko KATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY