Yuriko Sato

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck table using method
- Patent number 10,410,901
- Issue date Sep 10, 2019
- Disco Corporation
- Kenji Furuta
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for using a test wafer by forming modified layer using a las...
- Patent number 10,249,547
- Issue date Apr 2, 2019
- DISCO CORPORTATION
- Satoshi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK TABLE USING METHOD
- Publication number 20180247853
- Publication date Aug 30, 2018
- Disco Corporation
- Kenji Furuta
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEST WAFER AND USING METHOD THEREFOR
- Publication number 20170040235
- Publication date Feb 9, 2017
- Disco Corporation
- Satoshi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS