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Yury Yuditsky
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for compensation of illumination beam misalignment
Patent number
10,495,579
Issue date
Dec 3, 2019
KLA-Tencor Corporation
Frank Li
G01 - MEASURING TESTING
Information
Patent Grant
Wafer inspection
Patent number
10,488,348
Issue date
Nov 26, 2019
KLA-Tencor Corp.
Anatoly Romanovsky
G01 - MEASURING TESTING
Information
Patent Grant
Wafer inspection
Patent number
9,915,622
Issue date
Mar 13, 2018
KLA-Tencor Corp.
Anatoly Romanovsky
G01 - MEASURING TESTING
Information
Patent Grant
Scanning inspection system with angular correction
Patent number
9,587,936
Issue date
Mar 7, 2017
KLA-Tencor Corporation
Yury Yuditsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for high speed acquisition of moving images us...
Patent number
9,426,400
Issue date
Aug 23, 2016
KLA-Tencor Corporation
David L. Brown
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Wafer inspection
Patent number
9,279,774
Issue date
Mar 8, 2016
KLA-Tencor Corp.
Anatoly Romanovsky
G01 - MEASURING TESTING
Information
Patent Grant
Extended defect sizing range for wafer inspection
Patent number
9,091,666
Issue date
Jul 28, 2015
KLA-Tencor Corp.
Zhongping Cai
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Wafer Inspection
Publication number
20180164228
Publication date
Jun 14, 2018
KLA-Tencor Corporation
Anatoly Romanovsky
G01 - MEASURING TESTING
Information
Patent Application
System and Method for Compensation of Illumination Beam Misalignment
Publication number
20170336329
Publication date
Nov 23, 2017
KLA-Tencor Corporation
Frank Li
G01 - MEASURING TESTING
Information
Patent Application
Wafer Inspection
Publication number
20150369753
Publication date
Dec 24, 2015
KLA-Tencor Corporation
Anatoly Romanovsky
G01 - MEASURING TESTING
Information
Patent Application
Scanning Inspection System With Angular Correction
Publication number
20140278188
Publication date
Sep 18, 2014
Yury Yuditsky
G01 - MEASURING TESTING
Information
Patent Application
Method And Apparatus For High Speed Acquisition Of Moving Images Us...
Publication number
20140158864
Publication date
Jun 12, 2014
KLA-Tencor Corporation
David L. Brown
G01 - MEASURING TESTING
Information
Patent Application
Extended Defect Sizing Range for Wafer Inspection
Publication number
20130208269
Publication date
Aug 15, 2013
KLA-Tencor Corporation
Zhongping Cai
G01 - MEASURING TESTING
Information
Patent Application
Wafer Inspection
Publication number
20130016346
Publication date
Jan 17, 2013
KLA-Tencor Corporation
Anatoly Romanovsky
G01 - MEASURING TESTING