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Koshi-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Coating method, coating apparatus and recording medium
Patent number
11,938,511
Issue date
Mar 26, 2024
Tokyo Electron Limited
Masatoshi Kawakita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method, storage medium, and substrate processi...
Patent number
11,774,854
Issue date
Oct 3, 2023
Tokyo Electron Limited
Yusaku Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing method, storage medium, and substrate processi...
Patent number
11,480,881
Issue date
Oct 25, 2022
Tokyo Electron Limited
Yusaku Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating method, coating apparatus and recording medium
Patent number
11,407,005
Issue date
Aug 9, 2022
Tokyo Electron Limited
Masatoshi Kawakita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method and recording medium capable of suppres...
Patent number
11,079,679
Issue date
Aug 3, 2021
Tokyo Electron Limited
Yusaku Hashimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Development processing apparatus, development processing method, an...
Patent number
10,359,702
Issue date
Jul 23, 2019
Tokyo Electron Limited
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Development method, development device, and non-transitory computer...
Patent number
10,203,605
Issue date
Feb 12, 2019
Tokyo Electron Limited
Yusaku Hashimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing method, substrate processing apparatus, and no...
Patent number
10,185,220
Issue date
Jan 22, 2019
Tokyo Electron Limited
Yusaku Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Developing method, developing apparatus, and storage medium
Patent number
10,108,111
Issue date
Oct 23, 2018
Tokyo Electron Limited
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
COATING FILM FORMING METHOD, COATING FILM FORMING APPARATUS, AND ST...
Publication number
20230219116
Publication date
Jul 13, 2023
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSI...
Publication number
20230026275
Publication date
Jan 26, 2023
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING METHOD AND COATING APPARATUS
Publication number
20220371047
Publication date
Nov 24, 2022
Tokyo Electron Limited
Yusaku HASHIMOTO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
COATING METHOD, COATING APPARATUS AND RECORDING MEDIUM
Publication number
20220323990
Publication date
Oct 13, 2022
TOKYO ELECTRON LIMITED
Masatoshi Kawakita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSI...
Publication number
20220035248
Publication date
Feb 3, 2022
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING METHOD, COATING APPARATUS, AND STORAGE MEDIUM
Publication number
20210078035
Publication date
Mar 18, 2021
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING METHOD, COATING APPARATUS AND RECORDING MEDIUM
Publication number
20200353503
Publication date
Nov 12, 2020
TOKYO ELECTRON LIMITED
Masatoshi Kawakita
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM CAPABLE OF SUPPRES...
Publication number
20200050111
Publication date
Feb 13, 2020
TOKYO ELECTRON LIMITED
Yusaku Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPMENT PROCESSING APPARATUS, DEVELOPMENT PROCESSING METHOD, AN...
Publication number
20190146344
Publication date
May 16, 2019
TOKYO ELECTRON LIMITED
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing Method, Developing Apparatus, and Storage Medium
Publication number
20180284652
Publication date
Oct 4, 2018
TOKYO ELECTRON LIMITED
Takeshi SHIMOAOKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180157178
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Yusaku Hashimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVELOPMENT METHOD, DEVELOPMENT DEVICE, AND NON-TRANSITORY COMPUTER...
Publication number
20170285481
Publication date
Oct 5, 2017
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND NO...
Publication number
20170102616
Publication date
Apr 13, 2017
TOKYO ELECTRON LIMITED
Yusaku HASHIMOTO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...