Yusaku Hirota

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Chiyoka-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Two-fluid nozzle for cleaning substrate and substrate cleaning appa...
- Patent number 8,037,891
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Itaru Kanno
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 7,989,283
- Issue date Aug 2, 2011
- Renesas Electronics Corporation
- Shinichi Yamanari
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CLEANING A SEMICONDUCTOR DEVICE
- Publication number 20130189835
- Publication date Jul 25, 2013
- RENESAS ELECTRONICS CORPORATION
- Hirokazu KURISU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20110081753
- Publication date Apr 7, 2011
- Renesas Electronics Corporation
- Shinichi YAMANARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING A SEMICONDUCTOR DEVICE
- Publication number 20100330794
- Publication date Dec 30, 2010
- RENESAS TECHNOLOGY CORPORATION
- Hirokazu KURISU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20090137118
- Publication date May 28, 2009
- RENESAS TECHNOLOGY CORP.
- Yusaku Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING SUBSTRATES AND SUBSTRATE CLEANER
- Publication number 20090014028
- Publication date Jan 15, 2009
- RENESAS TECHNOLOGY CORP.
- Yusaku Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two-fluid nozzle for cleaning substrate and substrate cleaning appa...
- Publication number 20070141849
- Publication date Jun 21, 2007
- TOKYO ELECTRON LIMITED
- Itaru Kanno
- B08 - CLEANING