Yusaku IZAWA

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method, film formation apparatus and storage medium
- Patent number 8,853,100
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Masanobu Igeta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry cleaning method of substrate processing apparatus
- Patent number 8,562,751
- Issue date Oct 22, 2013
- Tokyo Electron Limited
- Isao Gunji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR FORMING DIELECTRIC FILM OF LOW-DIELECTRIC...
- Publication number 20140134852
- Publication date May 15, 2014
- TOKYO ELECTRON LIMITED
- Yusaku IZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD, FILM FORMATION APPARATUS AND STORAGE MEDIUM
- Publication number 20140004713
- Publication date Jan 2, 2014
- Masanobu IGETA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANNEALING METHOD AND ANNEALING APPARATUS
- Publication number 20120225568
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Yusaku IZAWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DRY CLEANING METHOD OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20120180811
- Publication date Jul 19, 2012
- Central Glass Company, Limited
- Isao GUNJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...