Yusaku Kashiwagi

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method for SiC film
- Patent number 11,041,239
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Taiki Katou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device including an MIS structure
- Patent number 10,833,166
- Issue date Nov 10, 2020
- Rohm Co., Ltd.
- Kenji Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective film forming method and method of manufacturing semicondu...
- Patent number 10,490,443
- Issue date Nov 26, 2019
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selective vertical growth of a dielectric material on a d...
- Patent number 10,453,681
- Issue date Oct 22, 2019
- Tokyo Electron Limited
- Kandabara N. Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming carbon nanotubes and carbon nanotube film formin...
- Patent number 10,041,174
- Issue date Aug 7, 2018
- Tokyo Electron Limited
- Takashi Matsumoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,293,543
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Shuji Azumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene patterning method and patterning member
- Patent number 9,219,008
- Issue date Dec 22, 2015
- Tokyo Electron Limited
- Takashi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming carbon nanotubes and carbon nanotube film formin...
- Patent number 9,059,178
- Issue date Jun 16, 2015
- Tokyo Electron Limited
- Takashi Matsumoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Polymerized film forming method and polymerized film forming apparatus
- Patent number 8,691,338
- Issue date Apr 8, 2014
- Tokyo Electron Limited
- Yumiko Kawano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for manufacturing semiconductor device, semiconductor device...
- Patent number 8,378,464
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Yoshihiro Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for dielectric film
- Patent number 7,867,922
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Shinji Ide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 7,662,728
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of low dielectric constant insulating film
- Patent number 7,645,481
- Issue date Jan 12, 2010
- Tokyo Electron Limited
- Masaru Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming insulation film and apparatus for forming insula...
- Patent number 7,601,402
- Issue date Oct 13, 2009
- Tokyo Electron Limited
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD FOR SiC FILM
- Publication number 20200063262
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Taiki KATOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR APPARATUS
- Publication number 20190355828
- Publication date Nov 21, 2019
- Rohm Co., Ltd.
- Kenji YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective Film Forming Method and Method of Manufacturing Semicondu...
- Publication number 20190096750
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Yumiko KAWANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SELECTIVE VERTICAL GROWTH OF A DIELECTRIC MATERIAL ON A D...
- Publication number 20180301335
- Publication date Oct 18, 2018
- TOKYO ELECTRON LIMITED
- Kandabara N. Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRAPHENE PATTERNING METHOD AND PATTERNING MEMBER
- Publication number 20160067680
- Publication date Mar 10, 2016
- TOKYO ELECTRON LIMITED
- Takashi MATSUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR FORMING CARBON NANOTUBES AND CARBON NANOTUBE FILM FORMIN...
- Publication number 20150259801
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Takashi MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING OPTICAL DEVICE AND OPTICAL DEVICE
- Publication number 20150214423
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Shinya KIKUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING ROD-TYPE LIGHT EMITTING DEVICE AND ROD-TYP...
- Publication number 20150214429
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Yoji IIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20150001588
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Isao Gunji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRAPHENE PATTERNING METHOD AND PATTERNING MEMBER
- Publication number 20140199829
- Publication date Jul 17, 2014
- TOKYO ELECTRON LIMITED
- Takashi MATSUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20140094027
- Publication date Apr 3, 2014
- OSAKA UNIVERSITY
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYMERIZED FILM FORMING METHOD AND POLYMERIZED FILM FORMING APPARATUS
- Publication number 20110171384
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Yumiko Kawano
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
EVAPORATOR
- Publication number 20110023784
- Publication date Feb 3, 2011
- Yusaku Kashiwagi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...
- Publication number 20100171198
- Publication date Jul 8, 2010
- TOKYO ELECTRON LIMITED
- Yoshihiro KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION OF LOW DIELECTRIC CONSTANT INSULATING FILM
- Publication number 20100132613
- Publication date Jun 3, 2010
- TOKYO ELECTRON LIMITED
- Masaru SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method for Dielectric Film
- Publication number 20090152686
- Publication date Jun 18, 2009
- Tokyo Electron Limited
- Shinji Ide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD OF POROUS FILM AND COMPUTER-READABLE RECORDING...
- Publication number 20090053895
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiro OSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20090011149
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND ST...
- Publication number 20080184543
- Publication date Aug 7, 2008
- TOKYO ELECTRON LIMITED
- Takuji Sako
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fabrication of low dielectric constant insulating film
- Publication number 20070098890
- Publication date May 3, 2007
- Masaru Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method
- Publication number 20060205191
- Publication date Sep 14, 2006
- TOKYO ELECTRON LIMITED
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor manufacturing apparatus and heat treatment method
- Publication number 20040253839
- Publication date Dec 16, 2004
- TOKYO ELECTRON LIMITED
- Masahiro Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for forming film
- Publication number 20040253777
- Publication date Dec 16, 2004
- Hidenori Miyoshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming insulation film and apparatus for forming insula...
- Publication number 20040212114
- Publication date Oct 28, 2004
- TOKYO ELECTRON LIMITED
- Yusaku Kashiwagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yusaku Kashiwagi

Person

Patents Grantslast 30 patents

Film forming method for SiC film

Semiconductor device including an MIS structure

Selective film forming method and method of manufacturing semicondu...

Method of selective vertical growth of a dielectric material on a d...

Method for forming carbon nanotubes and carbon nanotube film formin...

Film forming method and film forming apparatus

Graphene patterning method and patterning member

Method for forming carbon nanotubes and carbon nanotube film formin...

Polymerized film forming method and polymerized film forming apparatus

Method for manufacturing semiconductor device, semiconductor device...

Film forming method for dielectric film

Substrate processing method

Fabrication of low dielectric constant insulating film

Method for forming insulation film and apparatus for forming insula...

Patents Applicationslast 30 patents

FILM FORMING METHOD FOR SiC FILM

SEMICONDUCTOR APPARATUS

Selective Film Forming Method and Method of Manufacturing Semicondu...

METHOD OF SELECTIVE VERTICAL GROWTH OF A DIELECTRIC MATERIAL ON A D...

GRAPHENE PATTERNING METHOD AND PATTERNING MEMBER

METHOD FOR FORMING CARBON NANOTUBES AND CARBON NANOTUBE FILM FORMIN...

METHOD FOR MANUFACTURING OPTICAL DEVICE AND OPTICAL DEVICE

METHOD FOR MANUFACTURING ROD-TYPE LIGHT EMITTING DEVICE AND ROD-TYP...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

GRAPHENE PATTERNING METHOD AND PATTERNING MEMBER

FILM FORMING METHOD AND FILM FORMING APPARATUS

POLYMERIZED FILM FORMING METHOD AND POLYMERIZED FILM FORMING APPARATUS

EVAPORATOR

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...

FABRICATION OF LOW DIELECTRIC CONSTANT INSULATING FILM

Film Forming Method for Dielectric Film

FILM FORMING METHOD OF POROUS FILM AND COMPUTER-READABLE RECORDING...

SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND ST...

Fabrication of low dielectric constant insulating film

Substrate processing method

Semiconductor manufacturing apparatus and heat treatment method

Method and apparatus for forming film

Method for forming insulation film and apparatus for forming insula...