Yusaku SAKKA

Person

  • Shunan-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum processing apparatus

    • Patent number 11,710,619
    • Issue date Jul 25, 2023
    • HITACHI HIGH-TECH CORPORATION
    • Kohei Sato
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 10,998,168
    • Issue date May 4, 2021
    • HITACHI HIGH-TECH CORPORATION
    • Yusaku Sakka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 10,541,115
    • Issue date Jan 21, 2020
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus

    • Patent number 10,522,333
    • Issue date Dec 31, 2019
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 8,940,128
    • Issue date Jan 27, 2015
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20200066487
    • Publication date Feb 27, 2020
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THE VACUUM PROCESSING APPARATUS

    • Publication number 20180151336
    • Publication date May 31, 2018
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS

    • Publication number 20150214014
    • Publication date Jul 30, 2015
    • Hitachi High-Technologies Corporation
    • Kohei SATO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20130299091
    • Publication date Nov 14, 2013
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20130160949
    • Publication date Jun 27, 2013
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20130087288
    • Publication date Apr 11, 2013
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20120267050
    • Publication date Oct 25, 2012
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20120138229
    • Publication date Jun 7, 2012
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20110297320
    • Publication date Dec 8, 2011
    • Hitachi High-Technologies Corporation
    • Yusaku Sakka
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20110132540
    • Publication date Jun 9, 2011
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS