Yusaku Uehara

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Ageo City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure method and device manufacturing method including selective...
- Patent number 9,304,385
- Issue date Apr 5, 2016
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure apparatus and device manufacturing method
- Patent number 8,253,924
- Issue date Aug 28, 2012
- Nikon Corporation
- Yusaku Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus, and device producing method using tw...
- Patent number 7,817,249
- Issue date Oct 19, 2010
- Nikon Corporation
- Yusaku Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
RETICLE ERROR REDUCTION BY COOLING
- Publication number 20100186942
- Publication date Jul 29, 2010
- Alton H. Phillips
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND MASK
- Publication number 20100097588
- Publication date Apr 22, 2010
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Method, Exposure Apparatus and Device Manufacturing Method
- Publication number 20080218714
- Publication date Sep 11, 2008
- Nikon Corporation
- Yusaku Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and exposure apparatus, and device manufacturing me...
- Publication number 20080204682
- Publication date Aug 28, 2008
- Nikon Corporation
- Yusaku Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus and device producing method
- Publication number 20060244940
- Publication date Nov 2, 2006
- Nikon Corporation
- Yusaku Uehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY