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Yusei KUWABARA

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,869,753
    • Issue date Jan 9, 2024
    • Tokyo Electron Limited
    • Takahiro Senda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,705,346
    • Issue date Jul 18, 2023
    • Tokyo Electron Limited
    • Yusei Kuwabara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus having a baffle plate and a rectifying...
    • Patent number 10,304,666
    • Issue date May 28, 2019
    • Tokyo Electron Limited
    • Ryo Sasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 9,425,028
    • Issue date Aug 23, 2016
    • Tokyo Electron Limited
    • Yusei Kuwabara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220301832
    • Publication date Sep 22, 2022
    • TOKYO ELECTRON LIMITED
    • Takashi Aramaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220122814
    • Publication date Apr 21, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro Senda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210313201
    • Publication date Oct 7, 2021
    • TOKYO ELECTRON LIMITED
    • Yusei Kuwabara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EDGE RING, SUBSTRATE SUPPORT, PLASMA PROCESSING SYSTEM AND METHOD O...
    • Publication number 20210305022
    • Publication date Sep 30, 2021
    • TOKYO ELECTRON LIMITED
    • Hiroshi TSUJIMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THERMAL CONDUCTIVE MEMBER, PLASMA PROCESSING APPARATUS, AND VOLTAGE...
    • Publication number 20210159058
    • Publication date May 27, 2021
    • TOKYO ELECTRON LIMITED
    • Yusei Kuwabara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20170025256
    • Publication date Jan 26, 2017
    • TOKYO ELECTRON LIMITED
    • Ryo SASAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20140116620
    • Publication date May 1, 2014
    • TOKYO ELECTRON LIMITED
    • Yusei KUWABARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...