Yusuke AOKI

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,923,229
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,664,263
- Issue date May 30, 2023
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plasma processing
- Patent number 11,594,398
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Yusuke Aoki
- B08 - CLEANING
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,251,048
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Yusuke Aoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, device manufacturing method, and pl...
- Patent number 11,081,351
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,062,882
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for surface treatment of upper electrode, plasma processing...
- Patent number 9,741,540
- Issue date Aug 22, 2017
- Tokyo Electron Limited
- Yusuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND STORAGE MEDIUM
- Publication number 20230268165
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING...
- Publication number 20230138006
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220199363
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20220139752
- Publication date May 5, 2022
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220059385
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, DEVICE MANUFACTURING METHOD, AND PL...
- Publication number 20210057212
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200402805
- Publication date Dec 24, 2020
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PLASMA PROCESSING
- Publication number 20200266036
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200234925
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE FOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20200194238
- Publication date Jun 18, 2020
- TOKYO ELECTRON LIMITED
- Daisuke ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SURFACE TREATMENT OF UPPER ELECTRODE, PLASMA PROCESSING...
- Publication number 20160307741
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS

Yusuke AOKI

Person

Patents Grantslast 30 patents

Plasma processing method and plasma processing apparatus

Substrate processing method and substrate processing apparatus

Apparatus and method for plasma processing

Plasma processing method and plasma processing apparatus

Method of processing substrate, device manufacturing method, and pl...

Plasma processing apparatus and plasma processing method

Method for surface treatment of upper electrode, plasma processing...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND STORAGE MEDIUM

CLEANING METHOD, SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE, DEVICE MANUFACTURING METHOD, AND PL...

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

APPARATUS AND METHOD FOR PLASMA PROCESSING

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

STRUCTURE FOR SUBSTRATE PROCESSING APPARATUS

METHOD FOR SURFACE TREATMENT OF UPPER ELECTRODE, PLASMA PROCESSING...