Yusuke Futamata

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,887,092
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160233106
- Publication date Aug 11, 2016
- TOKYO ELECTRON LIMITED
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS