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Yusuke Hashimoto
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Kumamoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and cleaning method of mist guard
Patent number
12,148,632
Issue date
Nov 19, 2024
Tokyo Electron Limited
Yusuke Hashimoto
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
12,051,605
Issue date
Jul 30, 2024
Tokyo Electron Limited
Nobuhiro Ogata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nozzle, substrate processing apparatus, and substrate processing me...
Patent number
12,007,692
Issue date
Jun 11, 2024
Tokyo Electron Limited
Hiroki Sakurai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus
Patent number
11,955,352
Issue date
Apr 9, 2024
Tokyo Electron Limited
Hiroki Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and manufacturing method therefor
Patent number
11,715,650
Issue date
Aug 1, 2023
Tokyo Electron Limited
Yusuke Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus with resistance value varying mechanism
Patent number
11,488,849
Issue date
Nov 1, 2022
Tokyo Electron Limited
Yosuke Hachiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,430,673
Issue date
Aug 30, 2022
Tokyo Electron Limited
Yusuke Hashimoto
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,056,335
Issue date
Jul 6, 2021
Tokyo Electron Limited
Jiro Higashijima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,024,518
Issue date
Jun 1, 2021
Tokyo Electron Limited
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of cleaning substrate proces...
Patent number
10,486,208
Issue date
Nov 26, 2019
Tokyo Electron Limited
Nobuhiro Ogata
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and method of cleaning substrate pro...
Patent number
10,475,671
Issue date
Nov 12, 2019
Tokyo Electron Limited
Jiro Higashijima
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Liquid processing apparatus and liquid processing method
Patent number
9,346,084
Issue date
May 24, 2016
Tokyo Electron Limited
Shuichi Nagamine
B08 - CLEANING
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
9,275,881
Issue date
Mar 1, 2016
Tokyo Electron Limited
Shuichi Nagamine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
9,266,153
Issue date
Feb 23, 2016
Tokyo Electron Limited
Shuichi Nagamine
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
8,865,483
Issue date
Oct 21, 2014
Tokyo Electron Limited
Kazuhiro Aiura
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240157408
Publication date
May 16, 2024
TOKYO ELECTRON LIMITED
Daisuke GOTO
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE
Publication number
20240124984
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yusuke HASHIMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING ME...
Publication number
20230185199
Publication date
Jun 15, 2023
TOKYO ELECTRON LIMITED
Hiroki SAKURAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD OF MIST GUARD
Publication number
20230001458
Publication date
Jan 5, 2023
TOKYO ELECTRON LIMITED
Yusuke Hashimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220115249
Publication date
Apr 14, 2022
TOKYO ELECTRON LIMITED
Nobuhiro OGATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220112603
Publication date
Apr 14, 2022
TOKYO ELECTRON LIMITED
Hiroki SAKURAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210327728
Publication date
Oct 21, 2021
TOKYO ELECTRON LIMITED
Yusuke HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210210363
Publication date
Jul 8, 2021
TOKYO ELECTRON LIMITED
Hiroki SAKURAI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREFOR
Publication number
20210043467
Publication date
Feb 11, 2021
TOKYO ELECTRON LIMITED
Yusuke Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200203189
Publication date
Jun 25, 2020
TOKYO ELECTRON LIMITED
Yosuke Hachiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200152443
Publication date
May 14, 2020
TOKYO ELECTRON LIMITED
Jiro Higashijima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180221925
Publication date
Aug 9, 2018
TOKYO ELECTRON LIMITED
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING LIQUID SUPPLY METHOD
Publication number
20180090306
Publication date
Mar 29, 2018
TOKYO ELECTRON LIMITED
Jiro Higashijima
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING SUBSTRATE PROCES...
Publication number
20170361364
Publication date
Dec 21, 2017
TOKYO ELECTRON LIMITED
Nobuhiro Ogata
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF CLEANING SUBSTRATE PRO...
Publication number
20170200624
Publication date
Jul 13, 2017
TOKYO ELECTRON LIMITED
Jiro Higashijima
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20140290701
Publication date
Oct 2, 2014
TOKYO ELECTRON LIMITED
Shuichi Nagamine
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20140045281
Publication date
Feb 13, 2014
TOKYO ELECTRON LIMITED
Kazuhiro AIURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
Publication number
20130125931
Publication date
May 23, 2013
TOKYO ELECTRON LIMITED
Shuichi Nagamine
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20130104940
Publication date
May 2, 2013
TOKYO ELECTRON LIMITED
Shuichi Nagamine
H01 - BASIC ELECTRIC ELEMENTS