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Yusuke HAYASAKA

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,978,614
    • Issue date May 7, 2024
    • Tokyo Electron Limited
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,869,750
    • Issue date Jan 9, 2024
    • Tokyo Electron Limited
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,715,630
    • Issue date Aug 1, 2023
    • Tokyo Electron Limited
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus and shutter member
    • Patent number 10,529,599
    • Issue date Jan 7, 2020
    • Tokyo Electron Limited
    • Toshinori Kitabata
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20230326724
    • Publication date Oct 12, 2023
    • TOKYO ELECTRON LIMITED
    • Yusuke HAYASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220384154
    • Publication date Dec 1, 2022
    • TOKYO ELECTRON LIMITED
    • Yusuke HAYASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210272779
    • Publication date Sep 2, 2021
    • TOKYO ELECTRON LIMITED
    • Yusuke HAYASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200402775
    • Publication date Dec 24, 2020
    • TOKYO ELECTRON LIMITED
    • Yusuke Hayasaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190348262
    • Publication date Nov 14, 2019
    • TOKYO ELECTRON LIMITED
    • Yusuke HAYASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THERMALLY CONDUCTIVE SILICONE SHEET, MANUFACTURING METHOD THEREOF,...
    • Publication number 20150122422
    • Publication date May 7, 2015
    • TOKYO ELECTRON LIMITED
    • Yusuke Hayasaka
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SHUTTER MEMBER
    • Publication number 20150114564
    • Publication date Apr 30, 2015
    • TOKYO ELECTRON LIMITED
    • Toshinori KITABATA
    • H01 - BASIC ELECTRIC ELEMENTS