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Yusuke Iida
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Yokkaichi-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Pattern inspection method and pattern inspection apparatus
Patent number
9,176,074
Issue date
Nov 3, 2015
Kabushiki Kaisha Toshiba
Takayoshi Fujii
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
DEFECT DETECTION METHOD
Publication number
20150268177
Publication date
Sep 24, 2015
KABUSHIKI KAISHA TOSHIBA
Kaito YOKOCHI
G01 - MEASURING TESTING
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Patent Application
PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
Publication number
20140212023
Publication date
Jul 31, 2014
KABUSHIKI KAISHA TOSHIBA
Takayoshi FUJII
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION APPARATUS AND METHOD
Publication number
20130063721
Publication date
Mar 14, 2013
Kabushiki Kaisha Toshiba
Takayoshi FUJII
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20120242985
Publication date
Sep 27, 2012
Kabushiki Kaisha Toshiba
Mitsutoshi WATABIKI
G01 - MEASURING TESTING
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Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20120243770
Publication date
Sep 27, 2012
Kabushiki Kaisha Toshiba
Makoto Kaneko
G01 - MEASURING TESTING
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Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20120242995
Publication date
Sep 27, 2012
Kabushiki Kaisha Toshiba
Yusaku KONNO
G01 - MEASURING TESTING