Yusuke KIKUCHI

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
- Patent number 11,901,166
- Issue date Feb 13, 2024
- Tokyo Electron Limited
- Tetsuya Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20240177978
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240153796
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Yusuke KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240120182
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Yusuke KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230323538
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Yusuke KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20230249306
- Publication date Aug 10, 2023
- TOKYO ELECTRON LIMITED
- Yusuke KIKUCHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FILM THICKNESS MEASURING DEVICE, FILM FORMING SYSTEM, AND FILM THIC...
- Publication number 20220260362
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Yusuke KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
- Publication number 20220108880
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Tetsuya MIYASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yusuke KIKUCHI

Person

Patents Grantslast 30 patents

Magnetron sputtering apparatus and magnetron sputtering method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS

PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE

FILM THICKNESS MEASURING DEVICE, FILM FORMING SYSTEM, AND FILM THIC...

MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD