Yusuke Kubota

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Tsukuba City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Microwave waveguide apparatus, plasma processing apparatus and plas...
- Patent number 9,252,000
- Issue date Feb 2, 2016
- National University Corporation Nagoya University
- Hitoshi Itoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SURFACE MODIFYING METHOD AND SURFACE MODIFYING APPARATUS
- Publication number 20240079214
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Yuji Mimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING CONDUCTIVE FILM
- Publication number 20150056381
- Publication date Feb 26, 2015
- NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
- Masaru Hori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE WAVEGUIDE APPARATUS, PLASMA PROCESSING APPARATUS AND PLAS...
- Publication number 20140251955
- Publication date Sep 11, 2014
- National University Corporation Nagoya University
- Hitoshi Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATION DEVICE, PLASMA PROCESSING APPARATUS AND PLASMA PR...
- Publication number 20140008326
- Publication date Jan 9, 2014
- National University Corporation Nagoya University
- Hirotaka TOYODA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR