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Yusuke Muraoka
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate stage and heat treatment apparatus
Patent number
7,764,355
Issue date
Jul 27, 2010
Tohoku University
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-pressure processing apparatus and high-pressure processing method
Patent number
7,562,663
Issue date
Jul 21, 2009
Dainippon Screen Mfg. Co., Ltd.
Yusuke Muraoka
B08 - CLEANING
Information
Patent Grant
High pressure processing method and apparatus
Patent number
7,513,265
Issue date
Apr 7, 2009
Kabushiki Kaisha Kobe Seiko Sho
Tetsuya Yoshikawa
B08 - CLEANING
Information
Patent Grant
High-pressure processing apparatus and high-pressure processing method
Patent number
7,435,396
Issue date
Oct 14, 2008
Dainippon Screen Mfg. Co., Ltd.
Yusuke Muraoka
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing method, substrate processing apparatus and sub...
Patent number
7,384,484
Issue date
Jun 10, 2008
Dainippon Screen Mfg. Co., Ltd.
Yusuke Muraoka
G11 - INFORMATION STORAGE
Information
Patent Grant
High pressure processing method
Patent number
7,252,719
Issue date
Aug 7, 2007
Kabushiki Kaisha Kobe Seiko Sho
Yoshihiko Sakashita
B08 - CLEANING
Information
Patent Grant
High pressure processing apparatus and method
Patent number
7,111,630
Issue date
Sep 26, 2006
Dainippon Screen Mfg. Co., Ltd.
Ikuo Mizobata
B08 - CLEANING
Information
Patent Grant
High pressure processing apparatus and method
Patent number
7,080,651
Issue date
Jul 25, 2006
Dainippon Screen Mfg. Co., Ltd.
Ikuo Mizobata
B08 - CLEANING
Information
Patent Grant
High pressure processing apparatus and high pressure processing method
Patent number
7,000,653
Issue date
Feb 21, 2006
Kabushiki Kaisha Kobe Seiko Sho
Yoshihiko Sakashita
B08 - CLEANING
Information
Patent Grant
High pressure processing apparatus
Patent number
6,874,513
Issue date
Apr 5, 2005
Kabushiki Kaisha Kobe Seiko Sho
Masahiro Yamagata
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus equipping with high-pressure process...
Patent number
6,841,031
Issue date
Jan 11, 2005
Dainippon Screen Mfg. Co., Ltd.
Tomomi Iwata
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
High pressure processing apparatus and high pressure processing method
Patent number
6,823,880
Issue date
Nov 30, 2004
Kabushiki Kaisha Kobe Seiko Sho
Yoshihiko Sakashita
B08 - CLEANING
Information
Patent Grant
Method and system for processing substrate
Patent number
6,703,316
Issue date
Mar 9, 2004
Kabushiki Kaisha Kobe Seiko Sho
Yoichi Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-pressure drying apparatus, high-pressure drying method and sub...
Patent number
6,691,430
Issue date
Feb 17, 2004
Dainippon Screen Mfg. Co., Ltd.
Kimitsugu Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluid heating apparatus
Patent number
6,465,765
Issue date
Oct 15, 2002
Omron Corporation
Masakazu Katayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for processing substrates
Patent number
6,074,515
Issue date
Jun 13, 2000
Dainippon Screen Mfg. Co., Ltd.
Izuru Iseki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for drying substrates
Patent number
6,067,727
Issue date
May 30, 2000
Dainippon Screen Mfg. Co., Ltd.
Yusuke Muraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treating liquid replacing method, substrate treating method and sub...
Patent number
5,826,601
Issue date
Oct 27, 1998
Dainippon Screen Mfg., Co.
Yusuke Muraoka
B08 - CLEANING
Information
Patent Grant
Device for rinsing and drying substrate
Patent number
5,520,744
Issue date
May 28, 1996
Dainippon Screen Manufacturing Co., Ltd.
Kazonori Fujikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for heat-treating wafers
Patent number
4,849,608
Issue date
Jul 18, 1989
Dainippon Screen Mfg. Co., Ltd.
Yusuke Muraoka
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat processing apparatus for semiconductor manufacturing
Patent number
4,803,948
Issue date
Feb 14, 1989
Dainippon Screen Mfg. Co., Ltd.
Keiji Nakagawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE STAGE AND HEAT TREATMENT APPARATUS
Publication number
20080024742
Publication date
Jan 31, 2008
Tadahiro Ohmi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
HIGH PRESSURE PROCESSING METHOD
Publication number
20060032520
Publication date
Feb 16, 2006
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD)
Yoshihiko Sakashita
B08 - CLEANING
Information
Patent Application
High-pressure processing apparatus and high-pressure processing method
Publication number
20050079107
Publication date
Apr 14, 2005
Dainippon Screen Mfg. Co., Ltd.
Yusuke Muraoka
G05 - CONTROLLING REGULATING
Information
Patent Application
Cleaning apparatus for cleaning objects to be treated with use of c...
Publication number
20050005957
Publication date
Jan 13, 2005
Kabushiki Kaisha Kobe Seiko Sho
Masahiro Yamagata
B08 - CLEANING
Information
Patent Application
High pressure processing apparatus and method
Publication number
20040231698
Publication date
Nov 25, 2004
Dainippon Screen Mfg. Co., Ltd.
Ikuo Mizobata
B08 - CLEANING
Information
Patent Application
Substrate treating apparatus
Publication number
20040221880
Publication date
Nov 11, 2004
Kabushiki Kaisha Toshiba
Hiroshi Tomita
B08 - CLEANING
Information
Patent Application
High pressure processing apparatus and high pressure processing method
Publication number
20040194842
Publication date
Oct 7, 2004
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD)
Yoshihiko Sakashita
B08 - CLEANING
Information
Patent Application
High-pressure processing apparatus and high-pressure processing method
Publication number
20040182419
Publication date
Sep 23, 2004
Dainippon Screen Mfg. Co., Ltd.
Yusuke Muraoka
B08 - CLEANING
Information
Patent Application
High pressure processing method and apparatus
Publication number
20040123484
Publication date
Jul 1, 2004
Kabushiki Kaisha Kobe Seiko Sho
Tetsuya Yoshikawa
B08 - CLEANING
Information
Patent Application
Substrate processing method, substrate processing apparatus and sub...
Publication number
20040105936
Publication date
Jun 3, 2004
DAINIPPON SCREEN MFG. CO. LTD.
Yusuke Muraoka
G11 - INFORMATION STORAGE
Information
Patent Application
High-pressure treatment apparatus and high-pressure treatment method
Publication number
20040031441
Publication date
Feb 19, 2004
Yusuke Muraoka
B08 - CLEANING
Information
Patent Application
High-pressure drying apparatus, high-pressure drying method and sub...
Publication number
20030177659
Publication date
Sep 25, 2003
Dainippon Screen Mfg. Co., Ltd.
Kimitsugu Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus equipping with high-pressure process...
Publication number
20030019578
Publication date
Jan 30, 2003
Dainippon Screen Mfg. Co., Ltd.
Tomomi Iwata
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
High pressure processing apparatus and high pressure processing method
Publication number
20020179114
Publication date
Dec 5, 2002
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD)
Yoshihiko Sakashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High pressure processing apparatus and method
Publication number
20020170577
Publication date
Nov 21, 2002
Dainippon Screen Mfg. Co., Ltd.
Ikuo Mizobata
B08 - CLEANING
Information
Patent Application
Method and system for processing substrate
Publication number
20020160625
Publication date
Oct 31, 2002
KABUSHIKI KAISHA KOBE SEIKO SHO
Yoichi Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High-pressure processing apparatus
Publication number
20020148492
Publication date
Oct 17, 2002
Kabushiki Kaisha Kobe Seiko Sho
Masahiro Yamagata
B08 - CLEANING
Information
Patent Application
Fluid heating apparatus
Publication number
20010017296
Publication date
Aug 30, 2001
Omron Corporation and Dainippon Screen Mfg. Co.,
Masakazu Katayama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR