Yusuke Nakagawa

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Seal mechanism, seal trench, seal member, and substrate processing...
- Patent number 8,414,705
- Issue date Apr 9, 2013
- Tokyo Electron Limited
- Yusuke Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposit removing method and substrate processing method
- Patent number 8,303,719
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Sungtae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and substrate processing apparatus
- Patent number 8,231,732
- Issue date Jul 31, 2012
- Tokyo Electron Limited
- Yusuke Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,646,581
- Issue date Jan 12, 2010
- Sumitomo Osaka Cement Co., Ltd.
- Yasuharu Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20090205676
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Yusuke NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSIT REMOVING METHOD AND SUBSTRATE PROCESSING METHOD
- Publication number 20090205678
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Sungtae LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL MECHANISM, SEAL TRENCH, SEAL MEMBER, AND SUBSTRATE PROCESSING...
- Publication number 20090183832
- Publication date Jul 23, 2009
- TOKYO ELECTRON LIMITED
- Yusuke NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS COMPONENT AND MANUFACTURING METHOD THEREOF
- Publication number 20080173399
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Yusuke NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20070217114
- Publication date Sep 20, 2007
- Yasuharu Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...