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Yusuke Nakatani
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Tokyo, JP
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last 30 patents
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Patent Grant
Ion shield plate for plasma processing apparatus
Patent number
D1008986
Issue date
Dec 26, 2023
HITACHI HIGH-TECH CORPORATION
Yusuke Nakatani
D13 - Equipment for production, distribution, or transformation of energy
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20240194450
Publication date
Jun 13, 2024
Hitachi High-Tech Corporation
Yasushi Sonoda
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING METHOD
Publication number
20240194489
Publication date
Jun 13, 2024
Hitachi High-Tech Corporation
Yusuke Nakatani
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220319809
Publication date
Oct 6, 2022
Hitachi High-Tech Corporation
Taku Iwase
H01 - BASIC ELECTRIC ELEMENTS