Yusuke OHSAWA

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Dry metal etching method
- Patent number 8,808,562
- Issue date Aug 19, 2014
- Tokyo Electron Limited
- Yusuke Ohsawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DRY METAL ETCHING METHOD
- Publication number 20130065398
- Publication date Mar 14, 2013
- TOKYO ELECTRON LIMITED
- Yusuke OHSAWA
- H01 - BASIC ELECTRIC ELEMENTS