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Yusuke Ohsawa
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Film forming method of silicon oxide film, silicon oxide film, semi...
Patent number
8,486,792
Issue date
Jul 16, 2013
Tokyo Electron Limited
Hirokazu Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for recovering damaged components in lower region of low die...
Patent number
8,288,252
Issue date
Oct 16, 2012
Tokyo Electron Limited
Ryuichi Asako
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for recovering damage of low dielectric insulating film for...
Patent number
8,058,153
Issue date
Nov 15, 2011
Tokyo Electron Limited
Ryuichi Asako
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, INS...
Publication number
20120190211
Publication date
Jul 26, 2012
TOKYO ELECTRON LIMITED
Hirokazu Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING SILICON OXIDE FILM AND METHOD FOR MANUFACTURING...
Publication number
20120003842
Publication date
Jan 5, 2012
Tokyo Electron Limited
Hirokazu Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR RECOVERING DAMAGE OF LOW DIELECTRIC INSULATING FILM AND...
Publication number
20110294232
Publication date
Dec 1, 2011
TOKYO ELECTRON LIMITED
Ryuichi Asako
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD OF SILICON OXIDE FILM, SILICON OXIDE FILM, SEMI...
Publication number
20110074013
Publication date
Mar 31, 2011
TOKYO ELECTRON LIMITED
Hirokazu Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR RECOVERING DAMAGE OF LOW DIELECTRIC INSULATING FILM AND...
Publication number
20080311728
Publication date
Dec 18, 2008
TOKYO ELECTRON LIMITED
Ryuichi Asako
H01 - BASIC ELECTRIC ELEMENTS