Yusuke Ohsawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming method of silicon oxide film, silicon oxide film, semi...
- Patent number 8,486,792
- Issue date Jul 16, 2013
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for recovering damaged components in lower region of low die...
- Patent number 8,288,252
- Issue date Oct 16, 2012
- Tokyo Electron Limited
- Ryuichi Asako
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for recovering damage of low dielectric insulating film for...
- Patent number 8,058,153
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Ryuichi Asako
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, INS...
- Publication number 20120190211
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SILICON OXIDE FILM AND METHOD FOR MANUFACTURING...
- Publication number 20120003842
- Publication date Jan 5, 2012
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR RECOVERING DAMAGE OF LOW DIELECTRIC INSULATING FILM AND...
- Publication number 20110294232
- Publication date Dec 1, 2011
- TOKYO ELECTRON LIMITED
- Ryuichi Asako
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD OF SILICON OXIDE FILM, SILICON OXIDE FILM, SEMI...
- Publication number 20110074013
- Publication date Mar 31, 2011
- TOKYO ELECTRON LIMITED
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR RECOVERING DAMAGE OF LOW DIELECTRIC INSULATING FILM AND...
- Publication number 20080311728
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Ryuichi Asako
- H01 - BASIC ELECTRIC ELEMENTS