TREA

Yusuke Saitoh

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  • Kurokawa-gun, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Edge ring and etching apparatus
    • Patent number 11,887,822
    • Issue date Jan 30, 2024
    • Tokyo Electron Limited
    • Toshifumi Ishida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and etching processing apparatus
    • Patent number 11,043,391
    • Issue date Jun 22, 2021
    • Tokyo Electron Limited
    • Yusuke Saitoh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 9,793,134
    • Issue date Oct 17, 2017
    • Tokyo Electron Limited
    • Yusuke Saitoh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 9,779,961
    • Issue date Oct 3, 2017
    • Tokyo Electron Limited
    • Yusuke Saitoh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 9,613,824
    • Issue date Apr 4, 2017
    • Tokyo Electron Limited
    • Yusuke Saitoh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method of multilayered film
    • Patent number 9,536,707
    • Issue date Jan 3, 2017
    • Tokyo Electron Limited
    • Ryuuu Ishita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method of multilayered film
    • Patent number 9,263,239
    • Issue date Feb 16, 2016
    • Tokyo Electron Limited
    • Yusuke Saitoh
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents