Yusuke Sakai

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,117,632
- Issue date Aug 25, 2015
- NuFlare Technology, Inc.
- Saori Gomi
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20140127914
- Publication date May 8, 2014
- NuFlare Technology, Inc.
- Saori GOMI
- B82 - NANO-TECHNOLOGY