Yusuke Shimizu

Follow

Person

Hwaseong-City, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Resist mask processing method using hydrogen containing plasma
- Patent number 9,337,020
- Issue date May 10, 2016
- Tokyo Electron Limited
- Michihisa Takachi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250166980
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Yusuke SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTMENT METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250149315
- Publication date May 8, 2025
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20250149316
- Publication date May 8, 2025
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST MASK PROCESSING METHOD
- Publication number 20150104957
- Publication date Apr 16, 2015
- TOKYO ELECTRON LIMITED
- Michihisa Takachi
- H01 - BASIC ELECTRIC ELEMENTS