Yusuke SUZUKI

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and semiconductor production apparatus
- Patent number 12,359,308
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Yusuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,362,143
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Satoru Kawakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiN film embedding method
- Patent number 12,344,933
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,658,008
- Issue date May 23, 2023
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,626,330
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Yuji Otsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method
- Patent number 11,414,753
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Hideomi Hane
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
- Publication number 20250179625
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MEASURING FILM THICKNESS, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250067556
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Yuji OTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240371631
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
- Publication number 20240087885
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RECESS FILLING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230377876
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIN FILM EMBEDDING METHOD AND FILM FORMATION APPARATUS
- Publication number 20230357922
- Publication date Nov 9, 2023
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230077599
- Publication date Mar 16, 2023
- TOKYO ELECTRON LIMITED
- Yuji OTSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS
- Publication number 20220010424
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210398863
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Yuji OTSUKI
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210384009
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Satoru KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210375589
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210301402
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD
- Publication number 20210130950
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yusuke SUZUKI

Person

Patents Grantslast 30 patents

Film forming method and semiconductor production apparatus

Plasma processing apparatus and plasma processing method

SiN film embedding method

Film forming apparatus and film forming method

Film forming method and film forming apparatus

Processing method

Patents Applicationslast 30 patents

METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS

METHOD OF MEASURING FILM THICKNESS, AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS

RECESS FILLING METHOD AND SUBSTRATE PROCESSING APPARATUS

SIN FILM EMBEDDING METHOD AND FILM FORMATION APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

PROCESSING METHOD