Yusuke TACHINO

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Metal contamination prevention method and apparatus, and substrate...
- Patent number 11,486,043
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling gas supply apparatus and substrate processing...
- Patent number 9,758,867
- Issue date Sep 12, 2017
- Tokyo Electron Limited
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 9,640,448
- Issue date May 2, 2017
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method
- Patent number 9,422,624
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Metal Contamination Prevention Method and Apparatus, and Substrate...
- Publication number 20200040463
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Yoshihiro TAKEZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
- Publication number 20160284613
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Titanium Carbonitride Film and Film Formation App...
- Publication number 20150259792
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY METHOD AND THERMAL TREATMENT METHOD
- Publication number 20150221529
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Haruhiko FURUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAG...
- Publication number 20150211113
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING GAS SUPPLY APPARATUS AND SUBSTRATE PROCESSING...
- Publication number 20140290577
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Shigeru NAKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
- Publication number 20130340678
- Publication date Dec 26, 2013
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS AND HEAT TREATMENT APPARATUS
- Publication number 20130205611
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS, THERMAL TREATMENT APPARATUS, GAS SUPPLY METHO...
- Publication number 20120288625
- Publication date Nov 15, 2012
- TOKYO ELECTRON LIMITED
- Haruhiko FURUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yusuke TACHINO

Person

Patents Grantslast 30 patents

Metal contamination prevention method and apparatus, and substrate...

Method of controlling gas supply apparatus and substrate processing...

Film forming method, film forming apparatus, and storage medium

Heat treatment method

Patents Applicationslast 30 patents

Metal Contamination Prevention Method and Apparatus, and Substrate...

Film Forming Method, Film Forming Apparatus, and Storage Medium

Method of Forming Titanium Carbonitride Film and Film Formation App...

GAS SUPPLY METHOD AND THERMAL TREATMENT METHOD

VERTICAL HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD AND STORAG...

METHOD OF CONTROLLING GAS SUPPLY APPARATUS AND SUBSTRATE PROCESSING...

GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS

GAS SUPPLY APPARATUS AND HEAT TREATMENT APPARATUS

GAS SUPPLY APPARATUS, THERMAL TREATMENT APPARATUS, GAS SUPPLY METHO...