Yusuke Takamatsu

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 11,798,819
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Kazuki Kosai
- B08 - CLEANING
Information Patent Grant
Liquid supply device and liquid supply method
- Patent number 11,626,298
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Yusuke Takamatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,158,525
- Issue date Oct 26, 2021
- Tokyo Electron Limited
- Yasuhiro Takaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20230264233
- Publication date Aug 24, 2023
- Tokyo Electron Limited
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20210398828
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Kazuki Kosai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210210363
- Publication date Jul 8, 2021
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- B08 - CLEANING
Information Patent Application
LIQUID SUPPLY DEVICE AND LIQUID SUPPLY METHOD
- Publication number 20210111043
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Yusuke TAKAMATSU
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190067048
- Publication date Feb 28, 2019
- Tokyo Electron Limited
- Yasuhiro Takaki
- H01 - BASIC ELECTRIC ELEMENTS