Yusuke Takino

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,125,710
- Issue date Oct 22, 2024
- Tokyo Electron Limited
- Sho Kumakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, substrate processing apparatus, and substrate proce...
- Patent number 12,112,954
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Maju Tomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 12,009,219
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Yusuke Takino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 11,594,418
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Kentaro Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 11,462,407
- Issue date Oct 4, 2022
- Tokyo Electron Limited
- Yusuke Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 11,361,973
- Issue date Jun 14, 2022
- Tokyo Electron Limited
- Yusuke Takino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method
- Patent number 10,593,783
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Yusuke Takino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method
- Patent number 9,412,607
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...
- Publication number 20240312771
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Yusuke TAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20230377899
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Takahiro YONEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20230107264
- Publication date Apr 6, 2023
- TOKYO ELECTRON LIMITED
- Fumiya TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220246440
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220199415
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Yusuke TAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20210265169
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Kentaro YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCE...
- Publication number 20210233778
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Maju TOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20210175090
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Yusuke Takino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20210057220
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Yusuke YANAGISAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD
- Publication number 20190259860
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Yusuke TAKINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20140332372
- Publication date Nov 13, 2014
- TOKYO ELECTRON LIMITED
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS

Yusuke Takino

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Etching method, substrate processing apparatus, and substrate proce...

Substrate processing method

Etching method and etching apparatus

Etching method and etching apparatus

Etching method and etching apparatus

Processing method

Plasma etching method

Patents Applicationslast 30 patents

ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCE...

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

PROCESSING METHOD

PLASMA ETCHING METHOD