Yusuke WAKO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, component processing method, and subst...
- Patent number 11,798,793
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Satoshi Ohuchida
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBST...
- Publication number 20240006168
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Satoshi OHUCHIDA
- B08 - CLEANING
Information Patent Application
ETCHING METHOD
- Publication number 20230268191
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Maju TOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING...
- Publication number 20220389584
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Ryutaro SUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBST...
- Publication number 20220238315
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Satoshi OHUCHIDA
- B08 - CLEANING