Yusuke YAMAMOTO

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus for supplying gas of water repellent...
- Patent number 12,042,815
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Kotaro Tsurusaki
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Chemical supply system, substrate treatment apparatus incorporating...
- Patent number 10,035,173
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Toshinobu Furusho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical supply system, substrate treatment apparatus incorporating...
- Patent number 9,086,190
- Issue date Jul 21, 2015
- Tokyo Electron Limited
- Toshinobu Furusho
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist solution supply apparatus, resist solution supply method, an...
- Patent number 8,453,599
- Issue date Jun 4, 2013
- Tokyo Electron Limited
- Kosuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220105535
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Kotaro TSURUSAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING...
- Publication number 20150279702
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Toshinobu FURUSHO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING...
- Publication number 20130068324
- Publication date Mar 21, 2013
- TOKYO ELECTRON LIMITED
- Toshinobu Furusho
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RESIST SOLUTION SUPPLY APPARATUS, RESIST SOLUTION SUPPLY METHOD, AN...
- Publication number 20110045195
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Kosuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY