Yusuke YOSHIDA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 10,504,698
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Masayuki Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,312,057
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Masayuki Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring method and plasma processing system
- Patent number 9,412,565
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Yusuke Yoshida
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160126114
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Masayuki KOHNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160118224
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Masayuki KOHNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASURING METHOD AND PLASMA PROCESSING SYSTEM
- Publication number 20150221482
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Yusuke YOSHIDA
- G01 - MEASURING TESTING