Yuta Haga

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate state determining apparatus, substrate processing apparat...
- Patent number 11,598,007
- Issue date Mar 7, 2023
- Tokyo Electron Limited
- Nao Akashi
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
POSITION DETECTION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240320837
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Hikaru SATO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE STATE DETERMINING APPARATUS, SUBSTRATE PROCESSING APPARAT...
- Publication number 20200080202
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Nao Akashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE EJECTION DETECTION DEVICE, METHOD OF DETECTING SUBSTRATE...
- Publication number 20140345523
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Hitoshi KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...