Yuta HAMASHIMA

Person

  • Kumamoto, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing method

    • Patent number 12,255,082
    • Issue date Mar 18, 2025
    • Tokyo Electron Limited
    • Yuta Hamashima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus

    • Patent number 12,198,948
    • Issue date Jan 14, 2025
    • Tokyo Electron Limited
    • Jun Nonaka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

    • Publication number 20250054783
    • Publication date Feb 13, 2025
    • TOKYO ELECTRON LIMITED
    • Tatsuya NAGAMATSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS

    • Publication number 20230023265
    • Publication date Jan 26, 2023
    • TOKYO ELECTRON LIMITED
    • Jun NONAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD

    • Publication number 20230015936
    • Publication date Jan 19, 2023
    • TOKYO ELECTRON LIMITED
    • Yuta HAMASHIMA
    • H01 - BASIC ELECTRIC ELEMENTS