Yuta Matsushima

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 11,244,849
- Issue date Feb 8, 2022
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 10,460,976
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Katsuhiro Morikawa
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20200013666
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20170358479
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS