Yuta MOTEGI

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Fluid control device and semiconductor manufacturing apparatus
- Patent number 11,397,443
- Issue date Jul 26, 2022
- Fujikin Incorporated
- Kenji Aikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Valve device and fluid control device
- Patent number 11,255,458
- Issue date Feb 22, 2022
- Fujikin Incorporated
- Takahiro Matsuda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
FLUID CONTROL DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20210132638
- Publication date May 6, 2021
- Fujikin Incorporated
- Kenji AIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE DEVICE AND FLUID CONTROL DEVICE
- Publication number 20210131583
- Publication date May 6, 2021
- Fujikin Incorporated
- Takahiro MATSUDA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...